Browsing by Author "Lindner, J."
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Publication Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Journal article2005, Journal of the Electrochemical Society, (152) 11, p.F185-F189Publication Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes
Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.293Publication Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation
Proceedings paper2010-10, SiGe, Ge, and Related Compounds 4: Materials, Processing and Devices, 11/10/2010, p.933-939Publication Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications
Meeting abstract2010-10, 218th Electrochemical Society Meeting: SiGe, Ge & Related Compounds: Materials, Processing, and Devices Symposium, 10/10/2010, p.1952