Browsing by Author "Litt, Lloyd"

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Comparisons of 9% versus 6% transmission attenuated phase shift mask for the 65nm device node

Montgomery, Patrick K.
;
Litt, Lloyd
;
Conley, Will
;
Lucas, Kevin
;
van Wingerden, Johannes
Journal article
2004, Journal of Microlithography, Microfabrication and Microsystems, (3) 2, p.276-283
Model-based design improvements for the 100nm lithography generation

Lucas, Kevin
;
Postnikov, Sergei
;
Patterson, Kyle
;
Yuan, Min-Chi
;
Thomas, Carla
;
Thompson, Matt
Proceedings paper
2002, Optical Microlithograhy XV, 5/03/2002, p.215-226