Browsing by Author "Liu, H.Y."
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Complementary phase-shift mask towards 70-nm technology node
Proceedings paper2002, Optical Microlithography XV, 5/03/2002, p.AddendumPublication Extending ArF to the 65-nm node with full-phase lithography
Proceedings paper2003, Optical Microlithography XVI, 23/02/2003, p.1091-1102Publication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008