Browsing by Author "Liu, Xiang"
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Publication Planar polymer waveguids with a graded-index profile resulting from intermixing of methacrylates in closed microchannels
Journal article2018, Optical Materials, 76, p.210-215Publication Recent advances in EUV patterning in preparation towards high-NA EUV
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 124981GPublication Single exposure EUV patterning optimization and defect inspection of hexagonal contact hole arrays using voltage contrast metrology
Proceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024, p.Art. 132150B