Publication:

Recent advances in EUV patterning in preparation towards high-NA EUV

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2657432
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Author(s)

Nagahara, Seiji
;
Dauendorffer, Arnaud  
;
Thiam, Arame  
;
Liu, Xiang  
;
Kuwahara, Yuhei
;
Dinh, Cong Que
;
Okada, Soichiro  
;
Kawakami, Shinichiro
;
Genjima, Hisashi  
;
Nagamine, Noriaki  
;
Muramatsu, Makoto
;
Shimura, Satoru
;
Tsuboi, Atsushi
;
Nafus, Kathleen  
;
Feurprier, Yannick  
;
Demand, Marc  
;
Ramaneti, Rajesh  
;
Foubert, Philippe  
;
De Simone, Danilo  
;
Vandenberghe, Geert

Journal

Proceedings of SPIE

Abstract

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888 since deposited on 2023-07-28
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