Browsing by Author "Lopaev, Dimitri"
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Publication Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Journal article2016, Plasma Sources Science and Technology, (25) 5, p.55001Publication Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach