Browsing by Author "Lu, Lu"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023