Browsing by Author "Lubbers, A."
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Publication Chemicals for the Chlorination of Gate Oxides
Proceedings paper1994, Vacuum and Semiconductor Processing Conference, 15/06/1994Publication Chlorine precursors for gate oxidation processes
Proceedings paper1997, Environmental, Safety, and Health Issues in IC Production, 4/12/1996, p.115-125Publication Effect of different chlorine sources during gate oxidation
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.143-146Publication Just-Clean- Enough technology for the 21st century
Oral presentation1995, SEMICON Europe