Publication:

Just-Clean- Enough technology for the 21st century

Date

1995
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Author(s)

Heyns, Marc  
;
Meuris, Marc  
;
Mertens, Paul  
;
Hurd, Trace
;
Schmidt, Harald
;
Depas, Michel
;
Rotondaro, Antonio
;
Vermeire, Bert
;
Vandervorst, Wilfried  
;
Storm, Wolfgang
;
Polleunis, C.
;
Bertrand, P.
;
McGeary, M. J.
;
Lubbers, A.
;
Hatcher, Z.

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Abstract

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2138 since deposited on 2021-09-29
Acq. date: 2026-10-05

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