Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Just-Clean- Enough technology for the 21st century
Publication:
Just-Clean- Enough technology for the 21st century
Date
1995
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
650.pdf
396.93 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Meuris, Marc
;
Mertens, Paul
;
Hurd, Trace
;
Schmidt, Harald
;
Depas, Michel
;
Rotondaro, Antonio
;
Vermeire, Bert
;
Vandervorst, Wilfried
;
Storm, Wolfgang
;
Polleunis, C.
;
Bertrand, P.
;
McGeary, M. J.
;
Lubbers, A.
;
Hatcher, Z.
Journal
Abstract
Description
Metrics
Views
2123
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2123
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations