Publication:

Just-Clean- Enough technology for the 21st century

Date

1995
Presentation
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dc.contributor.authorHeyns, Marc
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHurd, Trace
dc.contributor.authorSchmidt, Harald
dc.contributor.authorDepas, Michel
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorVermeire, Bert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorPolleunis, C.
dc.contributor.authorBertrand, P.
dc.contributor.authorMcGeary, M. J.
dc.contributor.authorLubbers, A.
dc.contributor.authorHatcher, Z.
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T13:07:22Z
dc.date.available2021-09-29T13:07:22Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/677
dc.source.conferenceSEMICON Europe
dc.source.conferencedate4/04/1995
dc.source.conferencelocationGeneva Switzerland
dc.title

Just-Clean- Enough technology for the 21st century

dc.typeOral presentation
dspace.entity.typePublication
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