Browsing by Author "Luk-Pat, Gerry"

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Checking design conformance and optimizing manufacturability using automated double-patterning decomposition

Cork, Christopher M.
;
Ward, Brian
;
Barnes, Levi D.
;
Painter, Ben
;
Lucas, Kevin
;
Luk-Pat, Gerry
Proceedings paper
2008, Design for Manufacturability through Design-Process Integration II, 24/02/2008, p.69251Q
Double patterning OPC and design for 22nm to 16nm device nodes

Lucas, Kevin
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Cork, Chris
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Miloslavsky, Alex
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Luk-Pat, Gerry
;
Li, Xiaohai
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Barnes, Levi
;
Gao, Weimin
Proceedings paper
2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009
EDA perspective on manufacturable DPT solutions

Wiaux, Vincent
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Gao, Weimin
;
Lucas, Kevin
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Cork, Chris
;
Luk-Pat, Gerry
;
Miloslavsky, Alex
Oral presentation
2010, 7th Annual LithoVision Technical Symposium
Interactions of double patterning technology with wafer processing, OPC and design flows

Lucas, Kevin
;
Cork, Chris
;
Miloslavsky, Alex
;
Luk-Pat, Gerry
;
Barnes, Levi
;
Hapli, John
Proceedings paper
2008, Optical Microlithography XXI, 24/02/2008, p.692403