Browsing by Author "Luong, Vinh"
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Publication Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97760BPublication Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Proceedings paper2016, 42nd Micro- and Nano-Engineering - MNE, 19/09/2016Publication Towards electrical verification of contact holes obtained with DSA of BCP
Oral presentation2015, International Microprocesses and Nanotechnology Conference