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Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Publication:
Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chan, BT
;
Singh, Arjun
;
Luong, Vinh
;
Parnell, Doni
;
Yamashita, Fumiko
;
Gronheid, Roel
;
de Marneffe, Jean-Francois
;
Piumi, Daniele
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1996
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations
Metrics
Views
1996
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations