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Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications

Date

2016
Proceedings Paper
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dc.contributor.authorChan, BT
dc.contributor.authorSingh, Arjun
dc.contributor.authorLuong, Vinh
dc.contributor.authorParnell, Doni
dc.contributor.authorYamashita, Fumiko
dc.contributor.authorGronheid, Roel
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorPiumi, Daniele
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T10:14:22Z
dc.date.available2021-10-23T10:14:22Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26417
dc.source.conference42nd Micro- and Nano-Engineering - MNE
dc.source.conferencedate19/09/2016
dc.source.conferencelocationVienna Austria
dc.title

Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications

dc.typeProceedings paper
dspace.entity.typePublication
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