Browsing by Author "Lysaght, P."

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Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.
;
Kerber, Andreas
;
Hou, T.H.
;
Cartier, Eduard
;
Brown, G.A.
;
Bersuker, G.
;
Kim, Y.
;
Lim, C.
Proceedings paper
2004, Physics and Technology of High-k Gate Dielectrics II, 12/10/2003, p.347-359
Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.
;
Kerber, Andreas
;
Hou, T.H.
;
Cartier, E.
;
Brown, G.A.
;
Bersuker, G.
;
Kim, Y.
;
Lim, C.
Meeting abstract
2003, 204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials, 12/10/2003
Thermal processing of high-K materials thermodynamics and kinetics

Young, Edward
;
Chen, Jian
;
Cosnier, Vincent
;
Lysaght, P.
;
Maes, Jan
;
Roozeboom, F.
;
Zhao, Chao
Meeting abstract
2002, 201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III, 12/05/2002, p.715