Publication:

Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Date

2003
Meeting abstract
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Author(s)

Young, C.D.
;
Kerber, Andreas
;
Hou, T.H.
;
Cartier, E.
;
Brown, G.A.
;
Bersuker, G.
;
Kim, Y.
;
Lim, C.
;
Gutt, J.
;
Lysaght, P.
;
Bennett, J.
;
Lee, C.H.
;
Gopalan, S.
;
Gardner, M.
;
Zeitzoff, P.
;
Groeseneken, Guido  
;
Murto, R.W.
;
Huff, H.R.

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