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Browsing by Author "Müller, Matthias"

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    ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry

    Müller, Matthias
    ;
    Sioncke, Sonja
    ;
    Delabie, Annelies  
    ;
    Beckhoff, Burkhard
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.95-97
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    Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation

    van Dorp, Dennis  
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    Nyns, Laura  
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    Cuypers, Daniel
    ;
    Ivanov, Tsvetan  
    ;
    Brizzi, Simone
    Journal article
    2019, ACS Applied Electronic Materials, (1) 11, p.2190-2201
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    Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

    Müller, Matthias
    ;
    Hönicke, Philipp
    ;
    Detlefs, Blanka
    ;
    Fleischmann, Claudia  
    Journal article
    2014, Materials, (7) 4, p.3147-3159
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    Impact of ammonium sulfide solution on electronic prperties and ambient stability of germanium surfaces: towards Ge-based microelectronic devices

    Fleischmann, Claudia  
    ;
    Schouteden, Koen
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    Müller, Matthias
    ;
    Hönicke, Philipp
    ;
    Beckoff, Burkhard
    Journal article
    2013, Journal of Materials Chemistry C, (1) 26, p.4105-4113
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    Liquid-phase adsorption of sulfur on germanium: reaction mechanism and atomic geometry

    Fleischmann, Claudia  
    ;
    Houssa, Michel  
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    Müller, Matthias
    ;
    Beckhoff, Burkhard
    ;
    Boyen, Hans-Gerd  
    Journal article
    2013, Journal of Physical Chemistry C, (117) 15, p.7451-7458
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    Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere

    Le, Quoc Toan  
    ;
    Naumov, Sergej
    ;
    Conard, Thierry  
    ;
    Franquet, Alexis  
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    Müller, Matthias
    Journal article
    2013, ECS Journal of Solid State Science and Technology, (2) 5, p.N93-N98
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    Sacrificial self-assembled monolayers for the passivation of GaAs (100) surfaces and interfaces

    Cuypers, Daniel
    ;
    Fleischmann, Claudia  
    ;
    van Dorp, Dennis  
    ;
    Brizzi, Simone
    ;
    Tallarida, Massimo
    Journal article
    2016, Chemistry of Materials, (28) 16, p.5689-5701

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