Browsing by Author "MacKenzie, M."

Now showing 1 - 4 of 4

A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Docherty, F.T.
;
MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
;
McFadzean, S.
Journal article
2008-01, Microelectronic Engineering, (85) 1, p.61-64
Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activation

MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
;
Docherty, F.T.
;
McGilvery, C.M.
Journal article
2007, Electrochemical and Solid-State Letters, (10) 6, p.G33-G35
EELS analyses of metal-inserted high-k dielectric stacks

MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
McGilvery, C.M.
;
McFadzean, S.
;
De Gendt, Stefan
Proceedings paper
2008, EMC. 14th European Microscopy Congress. Volume 2: Materials Science, 1/09/2008, p.23-24
Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate

MacLaren, I.
;
Ras, T.
;
MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
Journal article
2009, Journal of the Electrochemical Society, (156) 8, p.G103-G108