Browsing by Author "Magana, John"
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Publication Additional evidence of EUV blank defects first seen by wafer printing
Proceedings paper2011, Photomask Technology 2011, 19/09/2011, p.81660EPublication Comparison between existing inspection techniques for EUV mask defects
Proceedings paper2010, International Symposium on Extreme Ultraviolet Lithography, 17/10/2010Publication EUV mask repair using a combination of focused-electron-beam-induced processing and vacuum Atomic Force Microscopy
Publication Evidence of printing blank-related defects on EUV masks missed by blank inspection
Proceedings paper2011, 27th European Mask and Lithography Conference - EMLC, 18/01/2011, p.79850WPublication Natural EUV mask blank defects: evidence, timely detection, analysis and outlook
Proceedings paper2010, Photomask Technology 2010, 13/09/2010, p.78231T