Browsing by Author "Makaro, Z."

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Economical shallow emitter formation by plasma immersion ion implantation and RTA process

Pinter, Istvan
;
Dusco, C.
;
Khanh, N. Q.
;
Adam, M.
;
Makaro, Z.
;
Barsony, I.
Proceedings paper
1998, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, 6/07/1998, p.1475-1478
Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan
;
Abdulhadi, A. H.
;
Makaro, Z.
;
Khanh, N. Q.
;
Adam, M.
;
Barsony, I.
;
Poortmans, Jef
Journal article
1999, Applied Surface Science, 138-139, p.224-227
Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan
;
Abdulhadi, A.
;
Makaro, Z.
;
Khanh, N.
;
Adam, M.
;
Barsony, I.
Oral presentation
1998, E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France.