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Economical shallow emitter formation by plasma immersion ion implantation and RTA process
Publication:
Economical shallow emitter formation by plasma immersion ion implantation and RTA process
Date
1998
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pinter, Istvan
;
Dusco, C.
;
Khanh, N. Q.
;
Adam, M.
;
Makaro, Z.
;
Barsony, I.
;
Sivoththaman, Sivanarayanamoorthy
;
Poortmans, Jef
;
Adriaenssens, G.
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1958
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
1958
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations