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Browsing by Author "Malavé, A."

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    Diamond tips and cantilevers for the characterization of semiconductor devices

    Malavé, A.
    ;
    Oesterschulze, E.
    ;
    Kulisch, W.
    ;
    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    Journal article
    1999, Diamond and Related Materials, (8) 2_5, p.283-287
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
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    Stephenson, Robert
    ;
    De Wolf, Peter
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    Vandervorst, Wilfried  
    Journal article
    2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    ;
    Stephenson, Robert
    ;
    De Wolf, Peter
    ;
    Hellemans, L.
    Proceedings paper
    1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436
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    Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

    Hantschel, Thomas  
    ;
    Trenkler, Thomas
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    Vandervorst, Wilfried  
    ;
    Malavé, A.
    ;
    Büchel, D.
    ;
    Kulisch, W.
    Journal article
    1999, Microelectronic Engineering, (46) 1_4, p.113-116

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