Browsing by Author "Malhouitre, Stéphane"
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Publication A new ultra-low K ILD material based on organic-inorganic hybrid resins
Publication Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's
Proceedings paper2002, Conference Proceedings ULSI XVII, 9/10/2001, p.61-66Publication Single damascene integration of porous zirkonTM version 1 low-k dielectric films
Journal article2003-11, Microelectronic Engineering, (70) 2_4, p.302-307