Publication:
Single damascene integration of porous zirkonTM version 1 low-k dielectric films
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1991 since deposited on 2021-10-15
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Acq. date: 2026-08-04
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Statistics
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1991 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-08-04
Citations