Single damascene integration of porous zirkonTM version 1 low-k dielectric films

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Author(s)

Malhouitre, Stéphane

;

Jehoul, Christiane

;

Van Aelst, Joke

;

Struyf, Herbert

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Brongersma, Sywert

;

Carbonell, Laure

;

;

;

Van Hove, Marleen

;

;

;

;

Journal

Microelectronic Engineering

Metrics

1982 since deposited on 2021-10-15

Acq. date: 2025-10-23