Publication:

Single damascene integration of porous zirkonTM version 1 low-k dielectric films

Date

2003-11
Journal article
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dc.contributor.authorMalhouitre, Stéphane
dc.contributor.authorJehoul, Christiane
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVos, Ingrid
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorGronbeck, D.
dc.contributor.authorGallagher, M.
dc.contributor.authorCalvert, J.
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorJehoul, Christiane
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-15T05:33:51Z
dc.date.available2021-10-15T05:33:51Z
dc.date.issued2003-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7852
dc.source.beginpage302
dc.source.endpage307
dc.source.issue2_4
dc.source.journalMicroelectronic Engineering
dc.source.volume70
dc.title

Single damascene integration of porous zirkonTM version 1 low-k dielectric films

dc.typeJournal article
dspace.entity.typePublication
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