Browsing by Author "Manger, Dirk"
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Publication Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
Journal article2009, Journal of Applied Physics, (106) 9, p.94101Publication Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers
Journal article2009, Microelectronic Engineering, (86) 7_9, p.1815-1817Publication High-k dielectrics for future generation memory devices
; ; ; Wang, Xin PengJournal article2009, Microelectronic Engineering, (86) 7_9, p.1789-1795