imec Institutional Repository Browsing {{ collection }} by Author "Mantl, S"

Publication

Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Chen, Peng

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Chu, Paul K.

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Hochbauer, T.

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Lee, J-K

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Nastasi, M.

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Buca, D.

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Mantl, S

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Loo, Roger

Journal article

2005, Applied Physics Letters, (86) 3, p.031904-1-031904-3

Publication

Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

Mantl, S

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Buca, D.

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Feste, S.

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Hollander, B.

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Lenk, St.

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Loo, Roger

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Caymax, Matty

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Carius, R.

Proceedings paper

2005-05, 4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4, 23/05/2005, p.36-37

Publication

Reduction of silicon dioxide interfacial layer to 4.6 Å EOT by Al remote scavenging in high-j/metal gate stacks on Si

Nichau, Alexander

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Schafer, A.

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Knoll, L.

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Wirths, S.

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Schram, Tom

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Ragnarsson, Lars-Ake

Journal article

2013, Microelectronic Engineering, 109, p.103-112

Publication

Relaxation of strained pseudomorphic SixGe1-x layers on He-implanted Si/d-Si:C/Si(100) substrates

Buca, D

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Minamisawa, R A

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Trinkaus, H

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Hollander, B

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Mantl, S

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Loo, Roger

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Nguyen, Duy

Journal article

2009, Applied Physics Letters, (95) 14, p.144103

Publication

Si+ ion implantation for strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures

Buca, Daniel

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Minamisawa, R.A.

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Trinkaus, H

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Mantl, S

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Loo, Roger

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Caymax, Matty

Journal article

2009, Journal of Applied Physics, (105) 11, p.114905

Browsing by Author "Mantl, S"