Browsing by Author "Mardani, Shabnam"
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Publication Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
Meeting abstract2012-03, Materials for Advanced Characterization - MAM, 11/03/2012, p.P3-05Publication Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Journal article2013, Microelectronic Engineering, 107, p.134-137Publication Influence of varying porogen loads and different UV cures on low-k film characteristics
Journal article2011, Journal of Nanoscience and Nanotechnology, (11) 9, p.8363-8367