Browsing by Author "Marsik, Prema"

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Challenges of UV curing of low-k materials: Effect of wavelength

Baklanov, Mikhaïl
;
Marsik, Prema
Proceedings paper
2009, 9th International Seminar "Porous Glasses - Special Glasses", 1/09/2009
Optical characteristics and UV modification of low-k materials

Marsik, Prema
;
Baklanov, Mikhaïl
;
Claeys, Cor
Proceedings paper
2008, 9th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT, 20/10/2008, p.765-768
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric

Aksenov, German
;
De Roest, David
;
Verdonck, Patrick
;
Dultsev, F.N.
;
Marsik, Prema
Proceedings paper
2009, Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 14/04/2009, p.1156-D02-08