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Conference contributions
Optical characteristics and UV modification of low-k materials
Publication:
Optical characteristics and UV modification of low-k materials
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Date
2008
Proceedings Paper
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17416.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Marsik, Prema
;
Baklanov, Mikhaïl
;
Claeys, Cor
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1833
since deposited on 2021-10-17
Acq. date: 2025-12-12
Citations
Metrics
Views
1833
since deposited on 2021-10-17
Acq. date: 2025-12-12
Citations