Publication:

Optical characteristics and UV modification of low-k materials

Date

2008
Proceedings Paper
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dc.contributor.authorMarsik, Prema
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-17T08:49:13Z
dc.date.available2021-10-17T08:49:13Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14124
dc.source.beginpage765
dc.source.conference9th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT
dc.source.conferencedate20/10/2008
dc.source.conferencelocationBeijing China
dc.source.endpage768
dc.title

Optical characteristics and UV modification of low-k materials

dc.typeProceedings paper
dspace.entity.typePublication
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