Browsing by Author "Maslow, M."
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Publication Extending EUV lithography for DRAM applications
; Publication SPM characterizaton of anomalies in phase shift mask and their effect on wafer features
Proceedings paper2001, Metrology, Inspection, and Process Control for Microlithography XV, 26/02/2001, p.188-199Publication Tone reversal patterning for advanced technology nodes
Proceedings paper2022, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2020-2022, p.1205605