Browsing by Author "Mattson, David"
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Publication Non-oxidizing solvent-based strip of ion implanted photoresist
Journal article2012, Solid State Phenomena, 187, p.97-100Publication Non-oxidizing solvent-based strip of ion implanted photoresist
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Surfaces, 20/09/2010Publication Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent
Journal article2011, Journal of the Electrochemical Society, (158) 2, p.H150-H155