Browsing by Author "Mayur, A.J."
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Publication Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology
Proceedings paper2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.23-26Publication Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
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