Browsing by Author "McGeary, M. J."
Now showing 1 - 4 of 4
- Results Per Page
- Sort Options
Publication Effect of Cl in gate oxidation
Proceedings paper1997, Materials Reliability in Microelectronics VII, 31/03/1997, p.149-160Publication Effect of Cl in gate oxidation
Proceedings paper1997, Science and Technology of Semiconductor Surface Preparation, 1/04/1997, p.89-100Publication Environmentally-friendly chlorine during oxidation
; ; ; Publication Just-Clean- Enough technology for the 21st century
Oral presentation1995, SEMICON Europe