Browsing by Author "Megens, henry"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Critical assessment of error budget components in double patterning immersion lithography
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control
Proceedings paper2009, Optical Microlithography XXII, 23/02/2009, p.72740R