Browsing by Author "Mehta, Sandeep"
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Publication Advanced processes for Si:P and Si:C:P epitaxial growth and low-temperature surface cleaning
Meeting abstract2014-11, Workshop on Atomically Controlled Processing for Ultra-large Scale Integration, 13/11/2014Publication Characterization of epitaxial Si:C:P and SI:P layers for source/drain formation in advanced bulk FinFETs
Proceedings paper2014-10, SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices, 5/10/2014, p.977-987Publication Low-temperature pre-epitaxy surface cleaning of Si and SiGe
Meeting abstract2015-05, 9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9, 17/05/2015, p.143-144