Publication:

Low-temperature pre-epitaxy surface cleaning of Si and SiGe

Date

2015-05

Meeting abstract

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Author(s)

Profijt, Harald

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Dhayalan, Sathish Kumar

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Hikavyy, Andriy

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Holsteyns, Frank

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Metrics

2032 since deposited on 2021-10-22

Acq. date: 2025-12-13