Browsing by Author "Metzger, T.H."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction
Journal article2009, Applied Physics Letters, (94) 18, p.181914Publication Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects
Journal article2009, Journal of Applied Physics, (106) 5, p.53524