Browsing by Author "Meynaerts, Ben"
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Publication From surface dependence in atomic layer deposition to area-selective deposition of TiN
Meeting abstract2019, 19th International Conference on Atomic Layer Deposition, 21/07/2019Publication Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide
Journal article2020, Journal of Physical Chemistry C, (124) 13, p.7163-7173