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From surface dependence in atomic layer deposition to area-selective deposition of TiN
Publication:
From surface dependence in atomic layer deposition to area-selective deposition of TiN
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Delabie, Annelies
;
Carbajal, Diego
;
Soethoudt, Job
;
Chan, BT
;
Altamirano Sanchez, Efrain
;
Meynaerts, Ben
;
Clerix, Jan-Willem
;
Van Elshocht, Sven
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1943
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-16
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Metrics
Views
1943
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-16
Citations