Publication:

From surface dependence in atomic layer deposition to area-selective deposition of TiN

Date

2019
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Delabie, Annelies  
;
Carbajal, Diego
;
Soethoudt, Job  
;
Chan, BT  
;
Altamirano Sanchez, Efrain  
;
Meynaerts, Ben
;
Clerix, Jan-Willem  
;
Van Elshocht, Sven  

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