Browsing by Author "Miloslavsky, Alex"
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Publication Design compliance for Spacer Is Dielectric (SID) patterning
Proceedings paper2012, Optical Microlithography XXV, 12/02/2012, p.83260DPublication Double patterning OPC and design for 22nm to 16nm device nodes
Publication EDA perspective on manufacturable DPT solutions
Oral presentation2010, 7th Annual LithoVision Technical SymposiumPublication Interactions of double patterning technology with wafer processing, OPC and design flows
Publication Physical design and mask synthesis considerations for DPT
Proceedings paper2008, SEMATECH Litho Forum, 13/05/2008Publication Physical design and mask synthesis considerations for DPT
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008