Browsing by Author "Mochi, Iacopo"
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Publication Assist features: placement, impact and relevance
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97761SPublication Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Journal article2019, Journal of Micro/Nanolithography MEMS and MOEMS, (18) 1, p.14002Publication Mask 3D effect mitigation by source optimization and assist feature placement
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication NXE:3300 insertion for N7 : status and challenges
Proceedings paper2015, International Symposium on Extreme Ultraviolet Lithography - EUVL, 5/10/2015