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Browsing by Author "Monreal, Victor"

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    Impact of annealing temperature on DSA process: toward faster assembly kinetics

    Suh, Hyo Seon  
    ;
    Nair, Vineet Vijayakrishnan  
    ;
    Rincon Delgadillo, Paulina  
    ;
    Doise, Jan  
    Proceedings paper
    2018, Advances in Patterning Materials and Processes XXXV, 24/02/2018, p.105860T
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    Roughness study on L/S patterning with chemo

    Dudash, Viktor  
    ;
    Suh, Hyo Seon  
    ;
    Lorusso, Gian  
    ;
    Her, YoungJun  
    ;
    Li, Jin
    ;
    Monreal, Victor
    Proceedings paper
    2019, The 5th DSA symposium, 16/10/2019
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    Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

    Suh, Hyo Seon  
    ;
    Dudash, Viktor  
    ;
    Lorusso, Gian  
    ;
    Her, YoungJun  
    ;
    Li, Jin
    ;
    Monreal, Victor
    Proceedings paper
    2020, Advances in Patterning Materials and Processes XXXVII, 23/02/2020, p.113260X

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