Browsing by Author "Moon, Kwang Jin"
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Publication Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfill
Journal article2007, Microelectronic Engineering, (84) 11, p.2681-2685Publication Electromigration study of ultra narrow copper lines in low-k dielectric
Oral presentation2007, Advanced Materials Conference - AMC