Browsing by Author "Moonens, Jos"
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Publication 4X reticles with 3% linewidth control for the development of 0.18 µm lithography
Proceedings paper1996, 16th Annual Symposium on Photomask Technology and Management, 18/09/1996, p.290-301Publication A 35nm diameter vertical silicon nanowire short-gate tunnelFET
Proceedings paper2009, Nanotechnology Workshop, 13/06/2009Publication Nanoscale selective silicon nanowires surface functionalization for sensing applications
Meeting abstract2010, MRS Spring Meeting Symposium K: Functional Materials and Nanostructures for Chemical and Biochemical Sensing, 5/11/2010, p.K6.4Publication Nanoscale silicon nanowires surface functionalization and characterization for sensing applications
Oral presentation2010, Nano-Electro-Mechanical Devices for Integrated Sensing and Switching. Satellite workshop to ESSDERC/ESSCIRCPublication Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Meeting abstract2012, MRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI, 9/04/2012