Browsing by Author "Mueller, Marcus"
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Publication Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers
Journal article2021, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (34) 1, p.11-16Publication Top-coats for scalable Nano-manufacturing with High-chi Block Copolymers in Lithographic Applications
Proceedings paper2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120O