Browsing by Author "Murto, R.W."

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Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.
;
Kerber, Andreas
;
Hou, T.H.
;
Cartier, Eduard
;
Brown, G.A.
;
Bersuker, G.
;
Kim, Y.
;
Lim, C.
Proceedings paper
2004, Physics and Technology of High-k Gate Dielectrics II, 12/10/2003, p.347-359
Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.
;
Kerber, Andreas
;
Hou, T.H.
;
Cartier, E.
;
Brown, G.A.
;
Bersuker, G.
;
Kim, Y.
;
Lim, C.
Meeting abstract
2003, 204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials, 12/10/2003