Browsing by Author "Naoki, Yamada"
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Publication Flat-band voltage shift of Ruthenium gated stacks and its link with the formation of a thin Ruthenium oxide layer at the Ruthenium/dielectric interface
Journal article2007-02, Journal of Applied Physics, (101) 3, p.34503Publication Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks
Journal article2007, Microelectronics Reliability, (47) 4_5, p.518-520