imec Institutional Repository Browsing {{ collection }} by Author "Neumaier, P."

Publication

Characterization of ultra thin oxynitrides, a general approach

Brijs, Bert

;

Deleu, Jeroen

;

Conard, Thierry

;

De Witte, Hilde

;

Vandervorst, Wilfried

;

Nakajima, K.

Oral presentation

1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.

Publication

Characterization of ultra thin oxynitrides: a general approach

Brijs, Bert

;

Deleu, Jeroen

;

Conard, Thierry

;

De Witte, Hilde

;

Vandervorst, Wilfried

;

Nakajima, K.

Journal article

2000, Nuclear Instruments and Methods B, 161-163, p.429-434

Publication

High resolution depth profiling of future gate dielectric materials

Bergmaier, A.

;

Dollinger, G.

;

Görgens, L.

;

Neumaier, P.

;

Bender, Hugo

;

Brijs, Bert

;

Conard, Thierry

Oral presentation

2003, E-MRS Spring Meeting Symposium I: Functional Metal-Oxides-Semiconductor Structures

Publication

High resolution elastic recoil detection

Dollinger, G.

;

Bergmaier, A.

;

Goergens, L.

;

Neumaier, P.

;

Vandervorst, Wilfried

;

Jakschik, S.

Journal article

2004, Nuclear Instruments & Methods in Physics Research B, 219-220, p.333-343

Browsing by Author "Neumaier, P."